Design, Simulation and Optimization of PZT-5A Cantilever Piezoelectric Pressure Sensor

Abstract

Aims: The main aim of this research work is: • To design a mathematical model of the sensor and validate with the 3D model simulation of the sensor in COMSOL Multiphysics simulator and • To optimize the sensor for maximizing its sensitivity. Study Design: In the methodology, we design and utilizePZT-5A piezoelectric in shear mode as the piezoelectric is attached on a cantilever structure. The various factors affecting the sensitivity of the sensor are investigated after validating the mathematical model with the simulated values. Place and Duration of Study: This study is done in the Department of Electronics and Communication Engineering, Rajiv Gandhi University, Arunachal Pradesh at COMSOL Simulation Laboratory during 2022 to 2023. Methodology: In this study, a cantilever structure is considered for the mechanical structure. The stress distribution on the structure is calculated for the applied pressure range from 0 to 1000 Pa. Later, the output voltage of the sensor is calculated. This mathematical model is validated with the COMSOL multiphysics simulator. The optimization of the sensor is done in mathematical tool with maximizing function after providing the conditions.  Results: The maximum stress on the sensor structure occurred near the clamped part of the cantilever. The calculated and simulated output sensitivities of the PZT-5A piezoelectric based pressure sensor are-1.6021 mV/kPa and -1.046887 mV/kPa respectively. Conclusion: We conclude that the PZT-5A piezoelectric based pressure sensor has a linear output with negative gradient as the stress induced on the structure is tensile stress. The various parameters that affect the sensitivity of the sensor arefound to depend on the shape and size of the cantilever structure, Poisson’s ratio and Young’s modulus, piezoelectric voltage coefficient and piezoelectric material thickness. Future Scope:  In future, this study can be extended by taking different shape and size of the cantilever. The different modes of piezoelectric and different materials may be another future scope of this study.