Structural, Surface and Optical Analysis of Al2O3 Thin Film on Al Substrates Prepared by Chemical Vapor Deposition Method
S. Shanmugan, A. Siti Sarah, J. Nur Jassriatul Aida & D. Mutharasu · Journal of Scientific Research and Reports · 2016
Aims: Synthesis of Aluminium oxide (Al2O3) thin films on Al substrates by CVD method and study their structural parameters and surface properties for various processing time. Study Design: Synthesized thin film samples were post processed with various temperature. The structural...
Open access
Research Article
10.9734/JSRR/2016/28155