On the Plasma Parameters in Co-sputtering Discharge
Mahdi Hasan Suhail, Kadhim A. Adim & Ahmad Hammed Wanas · Current Journal of Applied Science and Technology · 2015
In this work, a DC planar sputtering system has been successfully designed, manufactured and assembled. The glow discharge plasma chamber was made of stainless steel with a length of 40.5 cm and a diameter of 28 cm. This chamber consists of two Co- planar sputtering magnetrons ad...
Open access
Research Article
10.9734/BJAST/2015/14876